Susanto, I., Tsai, C.-Y., Nurzal, N., Purnomo, M.Z. and Ing-Song Yu 2023. Study on the Structure of GaN films deposited on MoS2/Sapphire via Plasma-Assisted Molecular Beam Epitaxy. Recent in Engineering Science and Technology. 1, 02 (Apr. 2023), 12–17. DOI:https://doi.org/10.59511/riestech.v1i02.14.